<http://webisa.webdatacommons.org/428874149>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/428874149>	<http://www.w3.org/ns/prov#value>	"For example, the etch stop layer 623 may include a nitride such as silicon nitride, an oxynitride such as silicon oxynitride, or any other suitable nitride, oxynitride, or combination thereof." .
<http://webisa.webdatacommons.org/prov/431582150>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/428874149> .
<http://webisa.webdatacommons.org/428874149>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .