<http://webisa.webdatacommons.org/prov/109293353>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/431404571> .
<http://webisa.webdatacommons.org/431404571>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/431404571>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/431404571>	<http://www.w3.org/ns/prov#value>	"Conventionally used positive electron beam resists are mainly composed of a polymer such as polymethyl methacrylate, poly(2,2,2-trifluoroethyl ??-chloroacrylate) or poly(1-butenesulfone)." .