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<http://webisa.webdatacommons.org/432733336>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/432733336>	<http://www.w3.org/ns/prov#value>	"Tungsten is a suitable conductive material, for which existing processes may be substituted in place of aluminum metallization processes." .
<http://webisa.webdatacommons.org/prov/57446325>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/432733336> .