<http://webisa.webdatacommons.org/432937268>	<http://www.w3.org/ns/prov#value>	"Further, in order to remove moisture or other gas included in the substrate, it is preferable to carry out annealing for degassing in vacuum and the substrate may be transported to the pretreatment chamber 103 connected to the transfer chamber 102 to carry out annealing in the pretreatment chamber 103." .
<http://webisa.webdatacommons.org/432937268>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/349946391>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/432937268> .
<http://webisa.webdatacommons.org/432937268>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .