<http://webisa.webdatacommons.org/436765142>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/436765142>	<http://www.w3.org/ns/prov#value>	"The present invention relates to a nonvolatile semiconductor memory device and its manufacturing method, and more particularly to a method for enhancing the performance, increasing the degree of integration, and improving the yield." .
<http://webisa.webdatacommons.org/prov/387627540>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/436765142> .
<http://webisa.webdatacommons.org/436765142>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .