<http://webisa.webdatacommons.org/440895208>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<nanotech-now.com> .
<http://webisa.webdatacommons.org/440895208>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/440895208>	<http://www.w3.org/ns/prov#value>	"The resist serves as a template for transferring the pattern to various materials, for example silicon, by means of etching." .
<http://webisa.webdatacommons.org/prov/45356719>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/440895208> .