<http://webisa.webdatacommons.org/440983552>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/440983552>	<http://www.w3.org/ns/prov#value>	"Thus, SiC is a promising structural material for fabricating ultra-high frequency micromechanical signal processing systems." .
<http://webisa.webdatacommons.org/prov/456053981>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/440983552> .
<http://webisa.webdatacommons.org/440983552>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/329069918>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/440983552> .