<http://webisa.webdatacommons.org/prov/425695411>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/445257894> .
<http://webisa.webdatacommons.org/445257894>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/445257894>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/287952438>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/445257894> .
<http://webisa.webdatacommons.org/445257894>	<http://www.w3.org/ns/prov#value>	"FIG. 14 shows a conventional scan type projection exposure apparatus which includes such a mechanism as a sensor or the like." .