<http://webisa.webdatacommons.org/454095239>	<http://www.w3.org/ns/prov#value>	"In other words, in the case in which the film of the resist is formed by the spin coating, there is a resist material to be wasted, and the process of edge cleaning is added as required." .
<http://webisa.webdatacommons.org/prov/46940368>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/454095239> .
<http://webisa.webdatacommons.org/454095239>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/454095239>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .