<http://webisa.webdatacommons.org/454095239> <http://www.w3.org/ns/prov#value> "In other words, in the case in which the film of the resist is formed by the spin coating, there is a resist material to be wasted, and the process of edge cleaning is added as required." . <http://webisa.webdatacommons.org/prov/46940368> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/454095239> . <http://webisa.webdatacommons.org/454095239> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/454095239> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.com> .