<http://webisa.webdatacommons.org/prov/54317827>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/455205036> .
<http://webisa.webdatacommons.org/455205036>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/455205036>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/455205036>	<http://www.w3.org/ns/prov#value>	"P-type dopants such as boron (B) or boron difluoride (BF2) may be implanted within opening 368 at an angle ?????? with respect to a line perpendicular to the surface of the substrate 110, as explained in detail above with reference to FIG. 5." .