<http://webisa.webdatacommons.org/455830151>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/455830151>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/446238642>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/455830151> .
<http://webisa.webdatacommons.org/455830151>	<http://www.w3.org/ns/prov#value>	"However, suitable devices for implanting impurity atoms such as oxygen, are not used in standard semiconductor production, and therefore must be procured additionally for this process." .