<http://webisa.webdatacommons.org/456213813>	<http://www.w3.org/ns/prov#value>	"A gas delivery apparatus 730 is disposed at an upper portion of the chamber body 682 to provide a gas, such as a process gas and/or a purge gas, to the process chamber 680." .
<http://webisa.webdatacommons.org/456213813>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/456213813>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/281611032>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/456213813> .