<http://webisa.webdatacommons.org/46454826>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/prov/240981669>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/46454826> .
<http://webisa.webdatacommons.org/46454826>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/46454826>	<http://www.w3.org/ns/prov#value>	"FIGS. 11A and 11B are a partial plan view and the cross-sectional view thereof, respectively, for illustrating a step in a thin-film processing method in the second example according to the invention." .
<http://webisa.webdatacommons.org/prov/241566413>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/46454826> .