<http://webisa.webdatacommons.org/47813147>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/prov/250249874>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/47813147> .
<http://webisa.webdatacommons.org/47813147>	<http://www.w3.org/ns/prov#value>	"FIG. 13A is a plan view showing the structures of the third and fourth resist patterns 23 185 and 24 185 according to the second embodiment of the present invention;" .
<http://webisa.webdatacommons.org/47813147>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .