<http://webisa.webdatacommons.org/prov/332731173>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/48201797> .
<http://webisa.webdatacommons.org/48201797>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/48201797>	<http://www.w3.org/ns/prov#value>	"FIGS. 3A and 3B are a plan view and a cross sectional view showing the structure of a semiconductor device formed in an active region." .
<http://webisa.webdatacommons.org/48201797>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/333837456>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/48201797> .