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<http://webisa.webdatacommons.org/49460709>	<http://www.w3.org/ns/prov#value>	"88Oct 15, 1998Jun 24, 2003Siemens AktiengesellschaftMethod for producing organic electroluminescent componentsUS6608343Dec 5, 2001Aug 19, 2003Micron Technology, Inc.Rough (high surface area) electrode from Ti and TiN, capacitors and semiconductor devices including sameUS6613240Dec 1, 2000Sep 2, 2003Epion CorporationMethod and apparatus for smoothing thin conductive films by gas cluster ion beamUS6" .