<http://webisa.webdatacommons.org/prov/61714758>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/51411932> .
<http://webisa.webdatacommons.org/51411932>	<http://www.w3.org/ns/prov#value>	"Then a compound such as a silicide is formed between the metal of the metal layer and the exposed portions of the surface semiconductor layer 18." .
<http://webisa.webdatacommons.org/51411932>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/51411932>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .