<http://webisa.webdatacommons.org/52206031>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/62320245>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/52206031> .
<http://webisa.webdatacommons.org/prov/44773414>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/52206031> .
<http://webisa.webdatacommons.org/52206031>	<http://www.w3.org/ns/prov#value>	"The substrate support may be made of various materials, such as aluminum and ceramic, and may include a heating element, such as a resistive heating coil." .
<http://webisa.webdatacommons.org/52206031>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .