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<http://webisa.webdatacommons.org/54060199>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.de> .
<http://webisa.webdatacommons.org/prov/329343804>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/54060199> .
<http://webisa.webdatacommons.org/54060199>	<http://www.w3.org/ns/prov#value>	"In FIG. 2C, a passivation layer 32 is formed on the substrate 10 by coating organic insulating material such as benzocyclobutene (BCB), for example, or by depositing inorganic insulating material such as silicon nitride (SiNx) or silicon oxide (SiO2), for example." .