<http://webisa.webdatacommons.org/5960363>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/311192018>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/5960363> .
<http://webisa.webdatacommons.org/5960363>	<http://www.w3.org/ns/prov#value>	"An impedance matching network is connected between the coil and source, to minimize RF reflections coupled back to the source from a load, including the coil and the plasma." .
<http://webisa.webdatacommons.org/prov/385105660>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/5960363> .
<http://webisa.webdatacommons.org/5960363>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .