<http://webisa.webdatacommons.org/60214124>	<http://www.w3.org/ns/prov#value>	"The planarizing liquid 44 can include solvents or other agents that chemically oxidize and/or etch the metal to increase the removal rate of the metal during planarization." .
<http://webisa.webdatacommons.org/prov/31917566>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/60214124> .
<http://webisa.webdatacommons.org/60214124>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/60214124>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .