<http://webisa.webdatacommons.org/6137748>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/284469684>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/6137748> .
<http://webisa.webdatacommons.org/prov/219809572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/6137748> .
<http://webisa.webdatacommons.org/6137748>	<http://www.w3.org/ns/prov#value>	"In one embodiment, the deposition inhibitor material is a compound or polymer that forms a self-assembled monolayer on the substrate." .
<http://webisa.webdatacommons.org/6137748>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .