<http://webisa.webdatacommons.org/62460406>	<http://www.w3.org/ns/prov#value>	"BACKGROUND OF THE INVENTION [0002] Semiconductor devices are made on substrates, such as silicon wafers or glass plates, for use in computers, monitors, and the like." .
<http://webisa.webdatacommons.org/62460406>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/337963166>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/62460406> .
<http://webisa.webdatacommons.org/prov/339351798>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/62460406> .
<http://webisa.webdatacommons.org/62460406>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .