<http://webisa.webdatacommons.org/6347008>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/6347008>	<http://www.w3.org/ns/prov#value>	"An example is an organic film of polyimide, polybenzoxazole (PBO) or the like, which is spin-coated to a thickness of, for example, about 3 to 7 ??m so as to be applied all over the bonding surface of the IC chip 91." .
<http://webisa.webdatacommons.org/6347008>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.de> .
<http://webisa.webdatacommons.org/prov/72008605>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/6347008> .