<http://webisa.webdatacommons.org/6459015>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/6459015>	<http://www.w3.org/ns/prov#value>	"In another embodiment, a dielectric material such as silicon nitride is deposited on a silicon substrate." .
<http://webisa.webdatacommons.org/prov/243819582>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/6459015> .
<http://webisa.webdatacommons.org/prov/44841541>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/6459015> .
<http://webisa.webdatacommons.org/6459015>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .