<http://webisa.webdatacommons.org/64634077>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/64634077>	<http://www.w3.org/ns/prov#value>	"Dishing occurs when a portion of the surface of a metal deposited in an aperture or other substrate structure formed in a dielectric layer is excessively polished resulting in one or more concavities or depressions." .
<http://webisa.webdatacommons.org/prov/185849551>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/64634077> .
<http://webisa.webdatacommons.org/64634077>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .