<http://webisa.webdatacommons.org/69734501>	<http://www.w3.org/ns/prov#value>	"MEMS may comprise complex engineering systems comprising microscopic mechanical elements, such as motors, pumps, relays, sensors, accelerometers and other components, which are powered by electrical energy." .
<http://webisa.webdatacommons.org/prov/290733691>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/69734501> .
<http://webisa.webdatacommons.org/prov/22030734>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/69734501> .
<http://webisa.webdatacommons.org/prov/424789404>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/69734501> .
<http://webisa.webdatacommons.org/69734501>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/69734501>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .