<http://webisa.webdatacommons.org/69788367>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/69788367>	<http://www.w3.org/ns/prov#value>	"First, a substrate having one or more contacts, vias or other features formed thereon has a first metal film deposited thereon." .
<http://webisa.webdatacommons.org/69788367>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/prov/229058344>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/69788367> .
<http://webisa.webdatacommons.org/prov/4873874>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/69788367> .