<http://webisa.webdatacommons.org/72085764>	<http://www.w3.org/ns/prov#value>	"The top surface 12 is formed over an insulating substrate 28 which can be formed from a ceramic material such as aluminum nitride, alumina or similar material." .
<http://webisa.webdatacommons.org/72085764>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/62320260>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/72085764> .
<http://webisa.webdatacommons.org/72085764>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .