<http://webisa.webdatacommons.org/72198107>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/72198107>	<http://www.w3.org/ns/prov#value>	"The contact hole is often filled with a metal, such as aluminum or tungsten." .
<http://webisa.webdatacommons.org/72198107>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/prov/363606097>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/72198107> .
<http://webisa.webdatacommons.org/prov/358765996>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/72198107> .