<http://webisa.webdatacommons.org/73247028>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<science.gov> .
<http://webisa.webdatacommons.org/prov/422046055>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/73247028> .
<http://webisa.webdatacommons.org/73247028>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/73247028>	<http://www.w3.org/ns/prov#value>	"A relatively high coupling efficiency was obtained to optimize mode matching by the finite-difference time-domain method by choosing appropriate grating parameters, including period, etching depth, and fill factor." .