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<http://webisa.webdatacommons.org/prov/412209631>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/73505108> .
<http://webisa.webdatacommons.org/73505108>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patentgenius.com> .
<http://webisa.webdatacommons.org/prov/60235805>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/73505108> .
<http://webisa.webdatacommons.org/prov/45356706>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/73505108> .
<http://webisa.webdatacommons.org/73505108>	<http://www.w3.org/ns/prov#value>	"As another example, the substrate material may include silicon, silicon germanium, gallium arsenide and other semiconductor materials employed in manufacturing." .