<http://webisa.webdatacommons.org/prov/246214002>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/74375216> .
<http://webisa.webdatacommons.org/74375216>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/74375216>	<http://www.w3.org/ns/prov#value>	"[0104] FIG. 47A is an isometric view of a parallel single wafer processing" .
<http://webisa.webdatacommons.org/74375216>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .