<http://webisa.webdatacommons.org/prov/400100483>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/76151599> .
<http://webisa.webdatacommons.org/76151599>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/76151599>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/76151599>	<http://www.w3.org/ns/prov#value>	"NFET dielectric layer 1308 can comprise any suitable dielectric material(s), including, but not limited to, an oxynitride, such as silicon oxynitride." .