<http://webisa.webdatacommons.org/prov/31864680>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/78121240> .
<http://webisa.webdatacommons.org/prov/46371071>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/78121240> .
<http://webisa.webdatacommons.org/78121240>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/78121240>	<http://www.w3.org/ns/prov#value>	"To form an insulating layer, a material such as silicon dioxide is deposited onto the surface of the layer 2 by e.g., chemical vapor deposition." .
<http://webisa.webdatacommons.org/78121240>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .