<http://webisa.webdatacommons.org/81326674> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/81326674> <http://www.w3.org/ns/prov#value> "made of material such as SiO.sub.2 or Si.sub.3N.sub.4 and is formed in" . <http://webisa.webdatacommons.org/prov/331586024> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/81326674> . <http://webisa.webdatacommons.org/81326674> <http://www.w3.org/ns/prov#wasQuotedFrom> <patents.com> .