<http://webisa.webdatacommons.org/81326674>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/81326674>	<http://www.w3.org/ns/prov#value>	"made of material such as SiO.sub.2 or Si.sub.3N.sub.4 and is formed in" .
<http://webisa.webdatacommons.org/prov/331586024>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/81326674> .
<http://webisa.webdatacommons.org/81326674>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .