<http://webisa.webdatacommons.org/83550728>	<http://www.w3.org/ns/prov#value>	"As a means for evading such problems, after a gate bus line is formed with aluminum as the lowest layer, a gate bus line and a gate electrode composed of refractory metal such as Ti and Cr is formed so as to completely cover the gate bus line composed of aluminum in some cases." .
<http://webisa.webdatacommons.org/83550728>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/83550728>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/464783599>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/83550728> .
<http://webisa.webdatacommons.org/prov/464635632>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/83550728> .