<http://webisa.webdatacommons.org/87082608>	<http://www.w3.org/ns/prov#value>	"FIG. 4B is a schematic cross sectional view of the apparatus and a stencil mask illustrating etching of a membrane for the stencil mask;" .
<http://webisa.webdatacommons.org/prov/463791436>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/87082608> .
<http://webisa.webdatacommons.org/87082608>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/87082608>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .