<http://webisa.webdatacommons.org/87704965>	<http://www.w3.org/ns/prov#value>	"FIGS. 9A and 9B respectively are a front view and a side view for explaining support of the wafers in a chemical chamber of the first embodiment;" .
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<http://webisa.webdatacommons.org/87704965>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/334397334>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/87704965> .