<http://webisa.webdatacommons.org/90958959>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/255270523>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/90958959> .
<http://webisa.webdatacommons.org/prov/306535582>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/90958959> .
<http://webisa.webdatacommons.org/90958959>	<http://www.w3.org/ns/prov#value>	"Depending on factors such as feature density, feature size and deposition process, the oxide film 16 tops out at different heights with respect to the top surfaces of nitride layer 15." .
<http://webisa.webdatacommons.org/90958959>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .