<http://webisa.webdatacommons.org/97634253>	<http://www.w3.org/ns/prov#value>	"As used herein, the term ???substrate??? refers to any semiconductor substrate, such as, for example, a semiconductor wafer substrate such as silicon or GaAs." .
<http://webisa.webdatacommons.org/prov/434290651>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/97634253> .
<http://webisa.webdatacommons.org/prov/236541374>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/97634253> .
<http://webisa.webdatacommons.org/97634253>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/97634253>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .