<http://webisa.webdatacommons.org/concept/_scatterometry_>	<http://www.w3.org/2000/01/rdf-schema#label>	"scatterometry" .
<http://webisa.webdatacommons.org/concept/_scatterometry_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"scatterometry" .
<http://webisa.webdatacommons.org/concept/_scatterometry_>	<http://www.w3.org/2002/07/owl#sameAs>	<http://dbpedia.org/resource/Scatterometer> .