<http://webisa.webdatacommons.org/concept/chemical-mechanical_polishing_>	<http://www.w3.org/2000/01/rdf-schema#label>	"chemical-mechanical polishing" .
<http://webisa.webdatacommons.org/concept/chemical-mechanical_polishing_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"chemical-mechanical" .
<http://webisa.webdatacommons.org/concept/chemical-mechanical_polishing_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"polishing" .
<http://webisa.webdatacommons.org/concept/chemical-mechanical_polishing_>	<http://www.w3.org/2002/07/owl#sameAs>	<http://dbpedia.org/resource/Chemical-mechanical_planarization> .