<http://webisa.webdatacommons.org/concept/euv_lithography_>	<http://www.w3.org/2002/07/owl#sameAs>	<http://dbpedia.org/resource/Extreme_ultraviolet_lithography> .
<http://webisa.webdatacommons.org/concept/euv_lithography_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"euv" .
<http://webisa.webdatacommons.org/concept/euv_lithography_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"lithography" .
<http://webisa.webdatacommons.org/concept/euv_lithography_>	<http://www.w3.org/2000/01/rdf-schema#label>	"euv lithography" .