<http://webisa.webdatacommons.org/concept/plasma_etch_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"etch" .
<http://webisa.webdatacommons.org/concept/plasma_etch_>	<http://www.w3.org/2000/01/rdf-schema#label>	"plasma etch" .
<http://webisa.webdatacommons.org/concept/plasma_etch_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"plasma" .
<http://webisa.webdatacommons.org/concept/plasma_etch_>	<http://www.w3.org/2002/07/owl#sameAs>	<http://dbpedia.org/resource/Plasma_etching> .