<http://webisa.webdatacommons.org/concept/semiconductor+wafer+processing_apparatus_>	<http://www.w3.org/2000/01/rdf-schema#label>	"semiconductor wafer processing apparatus" .
<http://webisa.webdatacommons.org/concept/semiconductor+wafer+processing_apparatus_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"semiconductor wafer processing" .
<http://webisa.webdatacommons.org/concept/semiconductor+wafer+processing_apparatus_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"apparatus" .