<http://webisa.webdatacommons.org/concept/substrate_processing_>	<http://www.w3.org/2000/01/rdf-schema#label>	"substrate processing" .
<http://webisa.webdatacommons.org/concept/substrate_processing_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"substrate" .
<http://webisa.webdatacommons.org/concept/substrate_processing_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"processing" .