<http://webisa.webdatacommons.org/concept/atomic+layer+deposition_ald_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"ald" .
<http://webisa.webdatacommons.org/concept/atomic+layer+deposition_ald_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"atomic layer deposition" .
<http://webisa.webdatacommons.org/concept/atomic+layer+deposition_ald_>	<http://www.w3.org/2000/01/rdf-schema#label>	"atomic layer deposition ald" .