<http://webisa.webdatacommons.org/concept/plasma-assisted+chemical+vapor_deposition_>	<http://www.w3.org/2000/01/rdf-schema#label>	"plasma-assisted chemical vapor deposition" .
<http://webisa.webdatacommons.org/concept/plasma-assisted+chemical+vapor_deposition_>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"plasma-assisted chemical vapor" .
<http://webisa.webdatacommons.org/concept/plasma-assisted+chemical+vapor_deposition_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"deposition" .