<http://webisa.webdatacommons.org/concept/reactive_ion_etch+rie>	<http://webisa.webdatacommons.org/ontology#hasPreModifier>	"reactive" .
<http://webisa.webdatacommons.org/concept/reactive_ion_etch+rie>	<http://webisa.webdatacommons.org/ontology#hasHead>	"ion" .
<http://webisa.webdatacommons.org/concept/reactive_ion_etch+rie>	<http://webisa.webdatacommons.org/ontology#hasPostModifier>	"etch rie" .
<http://webisa.webdatacommons.org/concept/reactive_ion_etch+rie>	<http://www.w3.org/2000/01/rdf-schema#label>	"reactive ion etch rie" .